CombiNEG 吸气剂复合型离子泵

CombiNEG 吸气剂复合型离子泵结合了最先进的安捷伦（原瓦里安）离子泵技术与 SAES 烧结型非蒸散型吸气剂 (NEG)。这款吸气剂复合型离子泵可提高可吸收气体、甲烷和惰性气体的泵速，压力可低至 10–12 mbar。

吸气剂模块可轻松插入离子泵中，使 CombiNEG 吸气剂复合型离子泵成为将离子泵和吸气剂技术结合到同一泵中的智能解决方案。

安捷伦基于 40–400、150–1000、150–2000 的泵和吸气剂尺寸，提供 3 种 CombiNEG 吸气剂复合型离子泵配置。

最典型应用包括

• • 粒子加速器

• • 同步加速器辐射源和相关设备

• • 表面科学

• • 扫描电子显微镜 (SEM)

• • 通用超高真空 (UHV) 和极高真空 (XHV) 应用

特性

• StarCell 离子泵抽气单元

• 光学屏蔽罩以避免吸气剂模块被钛溅射覆盖

• 真空烧制处理确保最低逸气率

• 优化的磁场，可实现最低的极限压力

• 侧面或底部端口允许插入烧结吸气剂模块

• 在低压下对活性气体具有极高抽速

• 紧凑、轻便的设计

• 可达到低于 10–12 mbar 的压力

下载附件

data-sheet-ion-combineg-pump-150-1000-150-2000-5994-1168en-agilent.pdf

data-sheet-ion-combineg-pump-40-400-5994-0871en-agilent.pdf

规格及型号说明

New Agilent Ion CombiNEG 40-400 

The Perfect Partnership Between UHV Leaders 

The Agilent Ion CombiNEG pumps are the result of the more than 100 years’ combined vacuum experience of Agilent Technologies and SAES GETTERS. Agilent (formerly Varian Vacuum) is the inventor of the ion pump, and SAES the originator of the NEG pump concept.

The Ion CombiNEG pumps combine the state-of-the-art Agilent Ion StarCell pump with the SAES NEG cartridge. These new pumps provide optimum pumping speed for getterable gases, methane, and noble gases and reach pressure values as low as 10-12 mbar.

The easy insertion of the NEG cartridge into the ion pump makes the Ion CombiNEG pump a smart solution, combining ion pump and NEG cartridge technologies in the same pump volume.

Pumping Speed - Ion CombiNEG 40-400 - StarCell, Nitrogen 

Typical pumping speed vs pressure diagram for Nitrogen (Ion Pump only, StarCell, saturated, equipped with shield))

Pumping Speed - Ion CombiNEG 40-400 - StarCell, Argon

Typical pumping speed vs pressure diagram for Argon (Ion Pump only, StarCell, saturated, equipped with shield)

NEG Cartridge The Ion CombiNEG 40-400 has a side port CFF 2”3/4 that is suitable to accommodate a SAES CapaciTorr D 400-2 getter pump. The CapaciTorr D 400-2 pump uses the high performing SINTERED St 172 (Zr-V-Fe) material in the form of disks to achieve high pumping performances in a very compact confi guration. A dedicated power supply is needed for the D 400-2 pump.

New Agilent Ion CombiNEG 150-1000 and 150-2000

The Perfect Partnership Between UHV Leaders 

The Agilent Ion CombiNEG pumps are the result of the more than 100 years’ combined vacuum experience of Agilent Technologies and SAES GETTERS. Agilent (formerly Varian Vacuum) is the inventor of the ion pump, and SAES the originator of the NEG pump concept.

The Ion CombiNEG pumps combine the state-of-the-art Agilent Ion StarCell pump with the SAES NEG cartridge. These new pumps provide optimum pumping speed for getterable gases, methane, and noble gases and reach pressure values as low as 10-12 mbar.

The easy insertion of the NEG cartridge into the ion pump makes the Ion CombiNEG pump a smart solution, combining ion pump and NEG cartridge technologies in the same pump volume.

Pumping Speed - Ion CombiNEG 150-1000 and 150-2000 - StarCell, Nitrogen

Typical pumping speed vs pressure diagram for Nitrogen (Ion Pump only, StarCell, saturated, equipped with shield))

Pumping Speed - Ion CombiNEG 150-1000 and 150-2000 - StarCell, Argon

Typical pumping speed vs pressure diagram for Argon (Ion Pump only, StarCell, saturated, equipped with shield)

NEG Cartridges The Ion CombiNEG 150-1000 and 150-2000 have a side port CFF 6” that is suitable to accommodate a SAES CapaciTorr D 1000 or D 2000 getter pumps. The CapaciTorr D 1000 and D 2000 pumps use the high performing SINTERED St 172 (Zr-V-Fe) material in the form of disks to achieve high pumping performances in a very compact configuration. A dedicated power supply is needed for the D 1000 or D 2000 pumps.